JPH069490Y2 - 半導体ウエハのプラズマアツシング装置 - Google Patents

半導体ウエハのプラズマアツシング装置

Info

Publication number
JPH069490Y2
JPH069490Y2 JP1321787U JP1321787U JPH069490Y2 JP H069490 Y2 JPH069490 Y2 JP H069490Y2 JP 1321787 U JP1321787 U JP 1321787U JP 1321787 U JP1321787 U JP 1321787U JP H069490 Y2 JPH069490 Y2 JP H069490Y2
Authority
JP
Japan
Prior art keywords
exhaust
chamber
gas supply
gas
external pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1321787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121437U (en]
Inventor
彰 福泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1321787U priority Critical patent/JPH069490Y2/ja
Publication of JPS63121437U publication Critical patent/JPS63121437U/ja
Application granted granted Critical
Publication of JPH069490Y2 publication Critical patent/JPH069490Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1321787U 1987-01-31 1987-01-31 半導体ウエハのプラズマアツシング装置 Expired - Lifetime JPH069490Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1321787U JPH069490Y2 (ja) 1987-01-31 1987-01-31 半導体ウエハのプラズマアツシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1321787U JPH069490Y2 (ja) 1987-01-31 1987-01-31 半導体ウエハのプラズマアツシング装置

Publications (2)

Publication Number Publication Date
JPS63121437U JPS63121437U (en]) 1988-08-05
JPH069490Y2 true JPH069490Y2 (ja) 1994-03-09

Family

ID=30802070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1321787U Expired - Lifetime JPH069490Y2 (ja) 1987-01-31 1987-01-31 半導体ウエハのプラズマアツシング装置

Country Status (1)

Country Link
JP (1) JPH069490Y2 (en])

Also Published As

Publication number Publication date
JPS63121437U (en]) 1988-08-05

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